Abstract:Spectroscopic evaluation of electron temperature and density in low-temperature, low-density, magnetized plasmas can be difficult, but necessary in situations where chemical erosion and physical sputtering prevent the use of other diagnostics, such as Langmuir probes (LP). Further, in such cases, because of the low densities and temperatures, the vessel and environment involved, theoretical line ratios derived from Collisional-Radiative (CR) models may not be easily applicable. This is the case, for example, of low-temperature (< 15 eV), low-density (< 1011 cm-3), magnetised plasma used for plasma-material interaction studies where chemical erosion and physical sputtering can be significant. The aim of the present work is to define an empirical line ratio (ELR) method derived from an extensive calibration campaign with the two diagnostics, using LP measurements as a reference. The ELR method is useful to permit the use of OES independent of LP in conditions that are critical for the latter, resulting in an effective instrument for the evaluation of plasma parameters. Further, the use of two different lines of sight and the influence of the magnetic field intensity on the measurements are also discussed. The proposed ELR method is demonstrated here for pure Ar linear plasmas and is in principle applicable also to other similar cases.

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

A Comparison among Optical Emission Spectroscopic Methods of Determining Electron Temperature in Low Pressure Argon Plasmas

Measurement of the Electron Density in Atmospheric-Pressure Low-Temperature Argon Discharges by Line-Ratio Method of Optical Emission Spectroscopy

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges

Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas

Empirical Line Ratios for Optical Emission Spectroscopy in low-temperature, low-density, magnetised Ar plasmas

The Techniques of Single Probe and Emission Spectroscopy Diagnostics in Low Temperature Argon Plasmas

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

A Simple Profile-Fitting Method to Determine the Metastable and Resonant Densities in A Cold Atmospheric Pressure Argon Plasma Jet

A Simple Collisional–radiative Model for Low-Pressure Argon–oxygen Mixture Discharges