Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

Ximing Zhu,James L. Walsh,Wencong Chen,Yikang Pu
DOI: https://doi.org/10.1088/0022-3727/45/29/295201
2012-01-01
Abstract:The temporal evolution of electron density in a nanosecond pulsed argon microplasma is measured using a combination of Stark broadening and the optical emission line-ratio method. In the initial discharge period (0-100 ns), the electron density can reach as high as similar to 10(18) cm(-3). It decreases to similar to 10(17)-10(16) cm(-3) in the early afterglow period (100 ns-1 mu s after the ignition) and similar to 10(16)-10(13) cm(-3) in the late afterglow period (1-20 mu s). It is demonstrated that the optical emission spectroscopy (OES) line-ratio method can obtain the electron density in the range 10(13)-10(16) cm(-3), while in the range 10(16)-10(18) cm(-3), the Stark broadening technique with argon 2p-1s lines (in Paschen's notation) is a better choice. These results are in good agreement with those from the Stark broadening technique with hydrogen Balmer lines. Finally, a possible mechanism for such a density evolution is briefly discussed.
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