Abstract:Abstract One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by a sinusoidal rf current density amplitude of 50 A m −2 at 13.56 MHz. The excited argon states (metastable levels, resonance levels, and the 4p manifold) are modeled self-consistently with the particle dynamics as space- and time-varying fluids. Four cases are examined, including and neglecting excited states, and using either a fixed or energy-dependent secondary electron emission yield due to ion and/or neutral impact on the electrodes. The results for all cases show that most of the ionization occurs near the plasma-sheath interfaces, with little ionization within the plasma bulk region. Without excited states, secondary electrons emitted from the electrodes are found to play a strong role in the ionization process. When the excited states, and secondary electron emission due to neutral and ion impact on the electrodes are included in the discharge model, the discharge operation transitions from α-mode to γ-mode, in which nearly all the ionization is due to secondary electrons. Secondary electron production due to the bombardment of excited argon atoms was approximately14.7 times greater than that due to ion bombardment. Electron impact of ground state argon atoms by secondary electrons contributes about 76% of the total ionization; primary electrons, about 11%; metastable Penning ionization, about 13%; and multi-step ionization, about 0.3%.

The Spatially Resolved Measurements of the Atomic Densities in Argon Paschen 1s Levels by Oes in A Capacitively Coupled Plasma

Investigation on the atomic density of metastable and resonant levels in inductively coupled argon plasma

The Population Distribution of Argon Atoms in Paschen 1s Levels in an Inductively Coupled Plasma

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas

Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes

Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Measurement Of Argon Emission Spectral Of Icp Plasma Using A Diagnostic System Based On Photomultiplier Tubes Array

Absolute Continuum Intensity Diagnostics of a Novel Large Coaxial Gridded Hollow Cathode Argon Plasma

Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: the role of metastable atoms

Surface effects in a capacitive argon discharge in the intermediate pressure regime

Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

Plasma Characteristics and Broadband Electromagnetic Wave Absorption in Argon and Helium Capacitively Coupled Plasma

Spatially-resolved measurement of electron density in a microwave-excited Ar/Kr split-ring resonator microplasma

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

The ring-shaped spatial distribution of the argon excimer, , in the effluent of the kINPen-sci

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Spatial Nonuniformity of Electron Energy in a Microwave Atmospheric-Pressure Microplasma

Nanosecond pulsed barrier discharge in argon for various frequencies and theoretical analysis of 2p states density ratios for E/N determination