Abstract:The electrical parameters of H 2 /Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe, where Ar fractions range from 0 % to 100 %. The influence of gas composition and pressure on electron density, the effective electron temperature and the electron energy probability functions (EEPFs) at different spatial positions are present. In driver region, with the introduction of a small amount of Ar at 0.3 Pa, there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature. Additionally, the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision. However, this phenomenon resulting from the changes in gas composition vanishes at 5 Pa duo to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge. The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa, as do the patterns of electron density variation between these two regions for differing Ar fractions. At 5 Pa, as the discharge transitions from H 2 to Ar, the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region. This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge. In order to validate the experimental results, we use the COMSOL simulation software to calculate electrical parameters under the same conditions. The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results.

Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

Observation of E × B Flow Velocity Profile Change Using Doppler Reflectometry in HL-2A

New Experimental Results Obtained using Microwave Reflectometry in HL-2 A Tokamak

Space and phase resolved optical emission in mode transitions of radio-frequency inductively coupled plasmas

The Spatially Resolved Measurements of the Atomic Densities in Argon Paschen 1s Levels by Oes in A Capacitively Coupled Plasma

Spatially-resolved measurement of electron density in a microwave-excited Ar/Kr split-ring resonator microplasma

Experimental studies of H 2 /Ar plasma in a cylindrical inductive discharges with an expansion region

Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

Hysteresis and Mode Transitions in Inductively Coupled Ar–Hg Plasma in the Electrodeless Induction Lamp

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

OES Diagnostics of H2 Plasma in an Intense ECR Proton Source

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

Electric Probe Measurements at Edge Region During H‐Mode Discharges in KSTAR

Transient striations in an inductively coupled plasma during E-to-H transitions

Experimental Study on Low Frequency Oscillation in a Plume of Hall Thrusters

Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

On the wave mode transition of argon helicon plasma

Decoupling NO production and UV emission intensity over the E-H mode transition in a low-pressure inductively coupled plasma device