Abstract:Optical emission spectroscopy (OES) is an important technique for the diagnostics of plasma parameters in the development of plasma devices and material processing technology. OES depends on the collisional-radiative model which can accurately describe the kinetics of excited species in plasma. Metastable species usually have higher density (2–4 orders of magnitude) and longer lifetime (3–6 orders of magnitude) compared to other excited species, thus play important roles in the reaction kinetics. However, the kinetic of metastable species can be complex due to the transport and self-absorption processes, which may lead to coupling of the plasma reaction kinetics in the adjacent areas. Moreover, the line splitting of some elements make the description of metastable kinetics more complex. This work presents an OES method based on a collisional-radiative model considering the hyperfine splitting of emission lines into metastable levels. The density distribution of metastable state is determined by the self-absorption effect. It is then taken into the rate balance equations of other excited species to make an accurate description of metastable related kinetics. The electron density and temperature are determined based on this model. The OES method is demonstrated on a miniaturized electron-cyclotron-resonance ion thruster. The metastable density, electron density and electron temperature are determined along the radial direction of the ion thruster, which can be useful for revealing the physics of discharge phenomenon and optimizing the performance of the plasma source. This method can be used to determine electron parameters in a large pressure range.

OES Diagnostics of H2 Plasma in an Intense ECR Proton Source

Microwave Diagnostics System in the HL-2A Tokamak

Understanding Hydrogen Plasma Processes Based on the Diagnostic Results of 2.45 GHz ECRIS at Peking University

Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

Plasma Parameter Diagnosis Using Hydrogen Emission Spectra of a Quartz-Chamber 2.45 GHz ECRIS at Peking University

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

An optical emission spectroscopy method for determining the electron temperature and density in low-temperature xenon plasma by using a collisional-radiative model considering the hyperfine structure of emission line into metastable state

Electron Temperature Diagnostics in Microwave Plasma Chemical Vapor Deposition by Optical Emission Spectroscopy

Optical Emission Spectroscopy As A Diagnostic for Plasmas in Liquids: Opportunities and Pitfalls

Simultaneous Diagnostics of Electron Density and Temperature in Micoplasma Reactor for Scanning Plasma Etching

Absolute Continuum Intensity Diagnostics of a Novel Large Coaxial Gridded Hollow Cathode Argon Plasma

Optical Emission Spectroscopy for Plasma Diagnosis of 2.45 GHz ECR Ion Source at Peking University

A Dual-Route Optical Emission Spectroscopy Diagnostic with Wide Spectral Range and High Wavelength Resolution on HL-2A Tokamak

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

Study of a Helicon Plasma by Emission Spectroscopy Methods

A xenon collisional-radiative model applicable to electric propulsion devices: III. Determination of the ionization fraction in low-temperature xenon plasma by using ionic and atomic 6<i>p</i> lines

Measurement of Electron Density and Temperature in an Annular Magnetically Confined Cold-Cathode Plasma of Helium by Optical Emission Spectroscopy

A nuclear-reaction-based method for probing the nonthermal ion energy spectrum in high energy density laboratory plasmas

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas