Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

An optical emission spectroscopy method for determining the electron temperature and density in low-temperature xenon plasma by using a collisional-radiative model considering the hyperfine structure of emission line into metastable state

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

A collisional-radiative model for atmospheric-pressure low-temperature air discharges

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

Application of emission spectroscopy in plasma-assisted NH 3 /air combustion using nanosecond pulsed discharge

A xenon collisional-radiative model applicable to electric propulsion devices: III. Determination of the ionization fraction in low-temperature xenon plasma by using ionic and atomic 6<i>p</i> lines

Optical And Electrical Diagnostics Of A Non-Equilibrium Air Plasma

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

Empirical Line Ratios for Optical Emission Spectroscopy in low-temperature, low-density, magnetised Ar plasmas

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra

Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

Temperature and Absolute Oh Density Measurement by the Relative Emission Spectroscopy in Diffuse Atmospheric-Pressure RF Glow Discharges

Analysis of Atomic Electronic Excitation in Nonequilibrium Air Plasmas

The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas