Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

Combined Vacuum Ultraviolet and Optical Emission Analysis of an Inductively Coupled Plasma

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

The Techniques of Single Probe and Emission Spectroscopy Diagnostics in Low Temperature Argon Plasmas

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Emission spectrum diagnostics for nitrogen plasmas generated by pulsed microwave discharge

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges

Optical and Electrical Diagnostics of an Atmospheric Pressure Room-Temperature Plasma Plume

Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator

Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy

Spectroscopic Measurement of Plasma Gas Temperature of the Atmospheric-Pressure Microwave Induced Nitrogen Plasma Torch

Characterization of an Atmospheric Helium Plasma Jet by Relative and Absolute Optical Emission Spectroscopy

Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge

Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas

Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

Spectroscopic Characterization of Plasmas Generated by ECR Microwave Discharge of N2 Gas and Pulsed Laser Ablation of a B4C Target