Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

Wang Zhong,Zhang Gui-Xin,Liu Cheng,Jia Zhi-Dong
DOI: https://doi.org/10.1088/0256-307x/31/5/055203
2014-01-01
Abstract:An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-rectangular resonator under the input of the microwave power at 2.45 GHz. The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar I lines in two different wavelength ranges while the electron temperature is researched by using line-to-continuum intensity ratio of Ar I lines. The electron density is compared by using the Stark broadenings of Ar I lines at 522.13nm and 549.59nm and Hβ line at 486.13 nm.
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