CHARACTERISTIC STUDY OF THE ARGON PLASMA EXCITED BY THE SLOT ANTENNAS OF ANNULAR WAVEGUIDE

Su Xiaobao,Wu Qin-chong,Wan Yuan-xi,Liang Rongqing,Yifeng Sui
1999-01-01
Abstract:A new large area microwave plasma source has been developed. The source consists of slots on the inner side which acts as a field applicator to sustain a plasma. The plasma is restricted in a Pyrex glass cylinder with an inner diameter of 30cm and a height of 50cm. The distance between slots is one half waveguide wavelength. A double Langmuir probe is used to characterize argon plasma as a function of microwave power, pressure and position. The results indicate that the electron temperature is 0.8-3.0eV and maximum ion density is 4.3×10 10 cm -3 for a microwave power range of 200-600W and a pressure range of 40-600Pa.
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