Abstract:The active-particle number density is a key parameter for plasma material processing, space propulsion, and plasma-assisted combustion.The traditional actinometry method focuses on measuring the density of the atoms in the ground state, but there is a lack of an effective optical emission spectroscopy method to measure intra-shell excited-state densities. The latter atoms have chemical selectivity and higher energy, and they can easily change the material morphology as well as the ionization and combustion paths. In this work, we present a novel state-resolved actinometry (SRA) method, supported by a krypton line-ratio method for the electron temperature and density, to measure the number densities of nitrogen atoms in the ground and intra-shell excited states. The SRA method is based on a collisional-radiative model, considering the kinetics of atomic nitrogen and krypton including their excited states. The densities measured by our method are compared with those obtained from a dissociative model in a miniature electron cyclotron resonance plasma (ECR) source. Furthermore, the saturation effect, in which the electron density remains constant due to the microwave propagation in an ECR plasma once the power reaches a certain value, is used to verify the electron density measured by the line-ratio method. An ionization balance model is also presented to examine the measured electron temperature. All the values obtained with the different methods are in good agreement with each other, and hence a set of verified rate coefficient data used in our method can be provided. A novel concept, the "excited-state system", is presented to quickly build an optical diagnostic method based on the analysis of quantum number propensity and selection rules.

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

A novel state-resolved actinometry method to determine the nitrogen atom number density in the ground state and intra-shell excited states in low-pressure electron cyclotron resonance plasmas

The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

Determination of Vibrational and Rotational Temperatures in Highly Constricted Nitrogen Plasmas by Fitting the Second Positive System of N-2 Molecules

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges

A Comparison among Optical Emission Spectroscopic Methods of Determining Electron Temperature in Low Pressure Argon Plasmas

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

Measurement of the Electron Density in Atmospheric-Pressure Low-Temperature Argon Discharges by Line-Ratio Method of Optical Emission Spectroscopy

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas

The Techniques of Single Probe and Emission Spectroscopy Diagnostics in Low Temperature Argon Plasmas

Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy

Diagnostic Study on the Electron Density Distribution of Microwave Plasma Jet in Vacuum Environment

Langmuir Probe Measurement and Theoretical Studies on Inductively Coupled Plasma in Ar-N-2 Discharge

Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma

Electron density measurements in low-pressure plasmas using cutoff probes and comparison with hairpin and Langmuir probes

Numerical Study on the Characteristics of Nitrogen Discharge at High Pressure with Induced Plasma