Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges

Influence of Mixture Compositions on Ion Energy Distributions in Ar/N-2 Electron Cyclotron Resonance Plasma

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

Tuning the Electron Temperature of a Nitrogen Plasma by Adding Helium and Argon

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Effect of Non-Maxwellian Electron Energy Distribution Functions on the Simulation of an Inductively Coupled Ar–Hg Discharge

Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

Measurement of neutral gas temperature in inductively coupled Ar and Ar/O2 plasmas

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

Measurement on Electron Density of High-Power and Large-Volume ICP-heated Wind Tunnel with HCN Laser Interferometer

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

Influence Of Noble Gases On Electron Cyclotron Heated Hydrogen Plasma

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Feasibility of Determining Electron Energy Distribution Function Using Optical Emission Lines in Low-Pressure Ar/Kr Discharge

Effect of Wall Reflection on the Determination of Electron Temperature by the Line-Ratio Method in Inductively Coupled Plasmas