Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Effect of Wall Reflection on the Determination of Electron Temperature by the Line-Ratio Method in Inductively Coupled Plasmas

New Experimental Results Obtained using Microwave Reflectometry in HL-2 A Tokamak

Analytical Calculation of the Measuring Error of an Electromagnetic Velocity Probe Caused by a Side Channel Wall

Optical interference induced by deposited wall-film in inductively coupled plasmas

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Line-of-sight gas radiation effects on near-infrared two-color ratio pyrometry measurements during plasma wind tunnel experiments

Numerical Simulation of Heat Transfer and Fluid Flow of a Non-Equilibrium Argon Plasma Jet with Confined Wall

Microwave Reflectometry to Characterize the Time-Varying Plasma Generated in the Shock Tube

Temperature Measurement of Mach Shock Reflection by Two-Wavelength NO-PLIF Method

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

Effect of Temperature Gradient on the Non-Equilibrium Rate of Flux Emitted by Plane Gold Wall

Impact of Inner-Wall Reflection on UV Reactor Performance As Evaluated by Using Computational Fluid Dynamics: the Role of Diffuse Reflection.

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

Analysis of uncertainty in measurement of electron temperature in low-pressure inductively coupled plasmas using microwave cutoff probe

Collective Thomson Scattering from High-Temperature High-Density Plasmas Revisited