Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Optical interference induced by deposited wall-film in inductively coupled plasmas

SEM Research of SiO2 Thin Film on Inner Wall of Glass Container by PECVD

Effect of Wall Reflection on the Determination of Electron Temperature by the Line-Ratio Method in Inductively Coupled Plasmas

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

Optical Fiber Interferometer Application for High Electron Density Measurements on Compact Torus Plasmas.

Gas-surface interactions in a large-scale inductively coupled wind tunnel investigated by emission/absorption spectroscopy

Dynamics of relativistic transparency and optical shuttering in expanding overdense plasmas

Characterization of A-C:H:n Deposition from CH4/N2 Rf Plasmas Using Optical Emission Spectroscopy

Optical Spectroscopy Diagnosis of Methane Plasma Generated with Atmospheric Pressure Jet

Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes

Time and space resolved diagnostics for plasma thermal-chemical instability of fuel oxidation in nanosecond plasma discharges

Non-destructive Plasma Frequency Measurement for a Semiconductor Thin Film Using Broadband Surface Plasmon Polaritons

Optical diagnostics of a low power—low gas flow rates atmospheric-pressure argon plasma created by a microwave plasma torch

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Combined Vacuum Ultraviolet and Optical Emission Analysis of an Inductively Coupled Plasma

Optical Emission Spectroscopy Investigation of A Surface Dielectric Barrier Discharge Plasma Aerodynamic Actuator

Long-time Measurements of Line-Integrated Plasma Electron Density Using a Two-Color Homodyne Optical Fiber Interferometer

Measuring the plasma-wall charge by infrared spectroscopy

Monitoring the deposited energy in laser-induced plasmas with an acoustic approach

Microwave Reflectometry to Characterize the Time-Varying Plasma Generated in the Shock Tube

Interactions Between Pulsed Laser-Induced Plasma and Ecr Microwave Plasma