Optical Spectroscopy Diagnosis of Methane Plasma Generated with Atmospheric Pressure Jet

Junfeng Zhang,Xinchao Bian,Qiang Chen,Yuefei Zhang,Fuping Liu
DOI: https://doi.org/10.3969/j.issn.1672-7126.2009.03.09
2009-01-01
Abstract:The reactive radicals in the methane plasma, generated by an atmospheric pressure, dielectric barrier discharge (DBD) plasma jet with argon as the buffer gas, were characterized with optical emission spectroscopy (OES) to better understand the growth of diamond-like carbon (DLC) nano-films. Various radicals, including CH, C2 and Hα, were in-situ observed in the DLC film deposition. The influence of the film growth conditions, such as the input voltage and gas flow rate, on the emission intensity of the CH radicals was studied to understand the decomposition mechanism of methane molecules. The results show that as the input voltage and the methane flow rate increase, the emission intensity of CH radicals increases. In addition, the electron temperature was found to be 0.4 eV~0.6 eV by means of the argon spectra; and it decreases with an increase of both the input voltage and methane flow rate.
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