Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Combined Vacuum Ultraviolet and Optical Emission Analysis of an Inductively Coupled Plasma

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Numerical investigation of vacuum ultra-violet emission in Ar/O$_2$ inductively coupled plasmas

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

Decoupling NO production and UV emission intensity over the E-H mode transition in a low-pressure inductively coupled plasma device

Numerical investigation of vacuum ultra-violet emission in Ar/O 2 inductively coupled plasmas

Absolute measurement of vacuum ultraviolet fluxes from inductively coupled plasmas via metal surface photoemission currents

Low Temperature Plasma Diagnostics with Tunable Synchrotron Vacuum Ultraviolet Photoionization Mass Spectrometry.

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

Core (XUV/VUV) and boundary (UV/vis/IR) plasma spectroscopy in fusion devices

Optical diagnostics of a low power—low gas flow rates atmospheric-pressure argon plasma created by a microwave plasma torch

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VUV diagnostic of electron impact processes in low temperature molecular hydrogen plasma

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Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

Inductively Coupled Facility Qualification for Electron Transpiration Cooling Investigations

Comparison of excitation temperature of a laser-produced plasma by combining emission and absorption spectroscopy

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas