Abstract:Capacitively coupled plasma driven by a very high frequency has attracted much attention due to its rather independent control of ion flux and energy. In this paper, Langmuir probe diagnostic technique is used to observe the evolution of plasma properties such as electron energy distribution function, electron temperature and density, etc. Our experiment is performed in capacitively coupled argon plasma driven by a 40.68 MHz frequency. Experimental results show that the electron energy probability function changes from bi-Maxwellian type to single-Maxwellian type and then to Druyvesteyn type with the increase of the discharge pressure. At a low gas pressure, the electron collisionless heating in bulk plasma leads to bi-Maxwellian type in electron energy possibility function (EEPF), which has a double temperatures structure in EEPF. As the gas pressure increases, the electrons with low energy are able to collide with the neutral species more frequently, thus they gain energies through collisional heating. Therefore, these electrons can overcome the dc ambipolar potential and the collisional heating becomes a main electron heating mechanism. Increasing the input power enhances the electron population with low energy. From the discharge center to the edge, electron population with low energy decreases clearly due to the dc ambipolar potential, and they are unable to reach an oscillating sheath where collisionless heating occurs. However, electron population with high energy is slightly increased. The result indicates that more uniform plasma can be achieved at a high gas pressure. Additionally, EEPFs are measured for different discharge gaps between electrodes. The change of electrode gap for the plasma leads to a transition of electron heating mode along the axial direction. In order to characterize the electron behavior further, we introduce the ratio of the cold electron density to hot electron density (alpha) and the ratio of cold electron temperature to hot electron temperature (beta). The ratios also show the proportional distributions of the cold and hot electron populations. The electrode gap has a great influences on alpha while little influence on beta. When the discharge gap between electrodes varies from 20 to 40 mm, alpha changes from 0.2 to 0.5 while beta has the same trend. Spatial distributions of electron density and temperature with low and high energy are also discussed.

Possibilities of Determining Non-Maxwellian EEDFs from the OES Line-Ratios in Low-Pressure Capacitive and Inductive Plasmas Containing Argon and Krypton

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

Feasibility of Determining Electron Energy Distribution Function Using Optical Emission Lines in Low-Pressure Ar/Kr Discharge

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas

Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

An optical emission spectroscopy method for determining the electron temperature and density in low-temperature xenon plasma by using a collisional-radiative model considering the hyperfine structure of emission line into metastable state

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

A xenon collisional-radiative model applicable to electric propulsion devices: III. Determination of the ionization fraction in low-temperature xenon plasma by using ionic and atomic 6<i>p</i> lines

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

Empirical Line Ratios for Optical Emission Spectroscopy in low-temperature, low-density, magnetised Ar plasmas

Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

OES Diagnostics of H2 Plasma in an Intense ECR Proton Source

Electron Population Properties with Different Energies in a Helicon Plasma Source

Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges

Diagnosis of Helicon Plasma by Local OES