Spatially-resolved measurement of electron density in a microwave-excited Ar/Kr split-ring resonator microplasma

B. Huang,Ximing Zhu,Wen-Cong Chen,Y. Pu
2012-01-01
Abstract:A microwave-excited microstrip split-ring resonator is investigated by using spatially-resolved OES diagnostics, focusing on the self-organized striations in Ar/Kr discharge at atmospheric pressure. Spatially-resolved emission intensity of several lines from Ar and Kr 2p levels is measured, from the ratio of which the electron density distribution is obtained with a collisional-radiative model. The electron density varies periodically in the microplasma, leading to a pattern of emission intestines.
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