Abstract:The electrical and plasma parameters of a low pressure inductively coupled argon plasma are investigated over a wide range of parameters (RF power, flow rate and pressure) by diverse characterizations. The external antenna voltage and current increase with the augment of RF power, whereas decline with the enhancement of gas pressure and flow rate conversely. Compared with gas flow rate and pressure, the power transfer efficiency is significantly improved by RF power, and achieved its maximum value of 0.85 after RF power injected excess 125 W. Optical emission spectroscopy (OES) provides the local mean values of electron excited temperature and electron density in inductively coupled plasma (ICP) post regime, which vary in a range of 0.81 eV to 1.15 eV and 3.7 × 10 16 m − 3 to 8.7 × 10 17 m − 3 , respectively. Numerical results of the average magnitudes of electron temperature and electron density in two-dimensional distribution exhibit similar variation trend with the experimental results under different operating condition by using COMSOL Multiphysics. By comprehensively understanding the characteristics in a low pressure ICP, optimized operating conditions could be anticipated aiming at different academic and industrial applications.

Investigation on the atomic density of metastable and resonant levels in inductively coupled argon plasma

The Population Distribution of Argon Atoms in Paschen 1s Levels in an Inductively Coupled Plasma

The Spatially Resolved Measurements of the Atomic Densities in Argon Paschen 1s Levels by Oes in A Capacitively Coupled Plasma

A Simple Collisional–radiative Model for Low-Temperature Argon Discharges with Pressure Ranging from 1 Pa to Atmospheric Pressure: Kinetics of Paschen 1s and 2p Levels

A Simple Collisional–radiative Model for Low-Pressure Argon Discharges

Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels

Measurement of the Electron Density in Atmospheric-Pressure Low-Temperature Argon Discharges by Line-Ratio Method of Optical Emission Spectroscopy

Spectra Simulation of the Argon Plasma

Measurement of metastable state Densities and electron temperatures in an electron cyclotron resonance argon plasma

Nonequilibrium Excited Particle Population Distribution in Low-Temperature Argon Discharges

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges

Determination of the De-Excitation Probability of Argon Metastable (1s5and 1s3) Atoms on Aluminum, Stainless Steel, Silicon, Quartz and Pyrex Surfaces

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

Determination of the Rate Coefficients of the Electron-Impact Excitation from the Metastable States to 2p States of Argon by the Emission Line Ratios in an Afterglow Plasma

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

A Simple Collisional–radiative Model for Low-Pressure Argon–oxygen Mixture Discharges

Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

Determination of the rate coefficient of the electron-impact excitation from the argon resonance states (1s2 and 1s4) to 2p states by the emission line ratio in an afterglow plasma

Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge

Brillouin Scattering Studies Of Liquid Argon At High Temperatures And High Pressures

A Novel Method of Using the OES Line Ratio to Determine the Spatially Resolved Atomic Density in Low-Temperature Plasmas and Its Application in Carbon and Aluminium Atoms in Capacitively Coupled Plasmas