Measurement of metastable state Densities and electron temperatures in an electron cyclotron resonance argon plasma

chen zhuo,he wei,pu yikang
DOI: https://doi.org/10.7498/aps.54.2153
IF: 0.906
2005-01-01
Acta Physica Sinica
Abstract:The number of metastable state densities obtained ranges from 1×10 15 to 4×10 15 m -3 in the electron cyclotron resonance (ECR) argon plasma by measuring the optical absorption of the 811.5 nm spectral line under the conditions of 0.2—0.8 Pa and 500—800 W. Taking into account the contribution of both the ground state and the 1s 5 metastable state to the emissions, the electron temperature T e is measured by the ratio of emission lines. Results show that there are obvious differences compared with only considering the metastable state densities.
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