Density Measurement of Helium Metastable States by Absorption Spectroscopy in an Inductively Coupled Plasma

Ying Li,Zhuo Chen,Yi-Kang Pu
DOI: https://doi.org/10.1002/ppap.200400091
IF: 3.877
2005-01-01
Plasma Processes and Polymers
Abstract:The densities of He metastable states 2(3)S(1) and 2(1)S(0) are measured by absorption spectroscopy. The emission lines 388.9 nm and 501.6 nm from inductively coupled He plasma doped with 5% of nitrogen are used in order to determine the gas temperature. The operating conditions are the following: gas pressures between 0.4 Pa and 2 Pa; and r.f. powers between 100 and 700 W. The measured values for the metastables densities were found to range from 3.9 x 10(15) m(-3) to 2.3 x 10(16) m(-3) for the 2(3)S(1) state, and from 9.5 x 10(14) m(-3) to 6.9 x 10(15) m(-3) for the 2(1)S(0) state, repectively. For a constant r.f. power level, the density first increases and then decreases with rising the pressure. for a fixed value of the pressure, it increases monotonically with increasing te r.f. power. The densities of the metastable states are lower than that of the ground state by four orders of magnitude.
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