Abstract:Abstract One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by a sinusoidal rf current density amplitude of 50 A m −2 at 13.56 MHz. The excited argon states (metastable levels, resonance levels, and the 4p manifold) are modeled self-consistently with the particle dynamics as space- and time-varying fluids. Four cases are examined, including and neglecting excited states, and using either a fixed or energy-dependent secondary electron emission yield due to ion and/or neutral impact on the electrodes. The results for all cases show that most of the ionization occurs near the plasma-sheath interfaces, with little ionization within the plasma bulk region. Without excited states, secondary electrons emitted from the electrodes are found to play a strong role in the ionization process. When the excited states, and secondary electron emission due to neutral and ion impact on the electrodes are included in the discharge model, the discharge operation transitions from α-mode to γ-mode, in which nearly all the ionization is due to secondary electrons. Secondary electron production due to the bombardment of excited argon atoms was approximately14.7 times greater than that due to ion bombardment. Electron impact of ground state argon atoms by secondary electrons contributes about 76% of the total ionization; primary electrons, about 11%; metastable Penning ionization, about 13%; and multi-step ionization, about 0.3%.

The Population Distribution of Argon Atoms in Paschen 1s Levels in an Inductively Coupled Plasma

Investigation on the atomic density of metastable and resonant levels in inductively coupled argon plasma

A Simple Collisional–radiative Model for Low-Temperature Argon Discharges with Pressure Ranging from 1 Pa to Atmospheric Pressure: Kinetics of Paschen 1s and 2p Levels

Nonequilibrium Excited Particle Population Distribution in Low-Temperature Argon Discharges

A Simple Collisional–radiative Model for Low-Pressure Argon Discharges

The Spatially Resolved Measurements of the Atomic Densities in Argon Paschen 1s Levels by Oes in A Capacitively Coupled Plasma

A Simple Collisional–radiative Model for Low-Pressure Argon–oxygen Mixture Discharges

Spectra Simulation of the Argon Plasma

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges

Determination of the rate coefficient of the electron-impact excitation from the argon resonance states (1s2 and 1s4) to 2p states by the emission line ratio in an afterglow plasma

Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels

Measurement of the Electron Density in Atmospheric-Pressure Low-Temperature Argon Discharges by Line-Ratio Method of Optical Emission Spectroscopy

OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model

The ring-shaped spatial distribution of the argon excimer, , in the effluent of the kINPen-sci

Nanosecond pulsed barrier discharge in argon for various frequencies and theoretical analysis of 2p states density ratios for E/N determination

Surface effects in a capacitive argon discharge in the intermediate pressure regime

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge

Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: Using both Stark broadening and an OES line-ratio method

Electron Cooling and Plasma Density Decay in Early Afterglow of Low Pressure Argon Plasmas

Spatial Nonuniformity of Electron Energy in a Microwave Atmospheric-Pressure Microplasma