A Novel Radiation Tolerant SOI Isolation Structure

赵洪辰,海潮和,韩郑生,钱鹤,司红
DOI: https://doi.org/10.3969/j.issn.1674-4926.2005.07.003
2005-01-01
Abstract:A novel radiation tolerant SOI isolation structure,consisting of thin SiO2/polysilicon/field SiO2 multilayers,is proposed. A device with this structure does not show obvious changes in subthreshold characteristics and leakage current,indicating a superior radiation tolerance to traditional LOCOS.
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