Eliminating the Floating-Body Effects in a Novel CMOS-compatible Thin-Soi LDMOS

Jiang Yongheng,Luo Xiaorong,Li Yanfei,Wang Pei,Fan Ye,Zhou Kun,Wang Qi,Hu Xiarong,Zhang Bo
DOI: https://doi.org/10.1088/1674-4926/34/9/094005
2013-01-01
Journal of Semiconductors
Abstract:A novel CMOS-compatible thin film SOI LDMOS with a novel body contact structure is proposed. It has a Si window and a P-body extended to the substrate through the Si window, thus, the P-body touches the P+ region to form the body contact. Compared with the conventional floating body SOI LDMOS (FB SOI LDMOS) structure, the new structure increases the off-state BV by 54%, decreases the specific on resistance by 20%, improves the output characteristics significantly, and suppresses the self-heating effect. Furthermore, the advantages of the low leakage current and low output capacitance of SOI devices do not degrade.
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