PASSIVATION EFFECT OF SiNx: H FILM ON CRYSTALLINE SILICON MATERIALS AND SOLAR CELLS

Canfeng Gong,Deren Yang,Xiaoquan Wang,Zhenqiang Xi,Lei Wang,Duanlin Que
DOI: https://doi.org/10.3321/j.issn:0254-0096.2005.05.003
2005-01-01
Abstract:Amorous silicon-nitride thin films were prepared by the means of PECVD on P-type monocrystalline and cast multicrystalline silicon wafer. It was found through μ-PCD that the minority-carrier lifetime in both materials increased noticeably. In addition, the performance of monocrystalline and multicrystalline silicon solar cells was tested before and after SiNx:H thin film deposition, it was found that the open voltage has been improved, the short current increased by about 1 mA/cm2 and that the efficiency increased by about 2.0%, respectively. The results above indicate that SiNx:H thin film has excellent surface- and bulk-passivation effect on crystalline silicon solar cells.
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