0.25 Mm SOI RF nMOSFETs depleted partially

Jun Li.,Rong Yang,Yuyin Zhao,Shumin Chai,Ming Liu,Qiuxia Xu,He Qian
2004-01-01
Abstract:Device structure and fabrication process of SOI nMOSFET depleted partially are proposed for multi-gigahertz RF applications. Many advanced techniques for deep submiron MOSFETs are incorporated into the proposed device. Main steps and conditions in process are given in details, with simulation and optimization by using the process simulator, Tsuprem4. Experiment results of 0.25 μm SOI RF nMOSFET are in consistence with simulated ones, and excellent or acceptable parameters of device performance are obtained for multi-gigahertz RF applications.
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