Design of a Dual-Material Gate LDMOS

LIU Qi,KE Dao-ming,CHEN Jun-ning,GAO Shan,LIU Lei
DOI: https://doi.org/10.3969/j.issn.1004-3365.2006.06.030
IF: 1.992
2006-01-01
Microelectronics Journal
Abstract:A novel dual-material gate LDMOSFET(DMG-LDMOS) structure for RF application is proposed,(along) with its process technology.Using the concept of gate engineering,the gate of the DMG-LDMOS consists of S-gate(the first gate approaching source with high work-function material p~+ polysilicon) and D-gate(the second gate approaching drain with low work-function material n~+ polysilicon).MEDICI simulation shows that the DMG-LDMOS can reduce the peak electric field at the end of the channel and around the drain,and improve transconductance and cutoff frequency of the device.Meanwhile,this structure can increase breakdown voltage of the device and reduce its hot carrier effect.
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