Study on Characteristics of a Dual-Material Gate LDMOS

Hong Qi,Chen Junning,Ke Daoming,Liu Lei,Gao Shan,Liu Qi
DOI: https://doi.org/10.3969/j.issn.1003-353X.2008.03.012
2008-01-01
Abstract:A novel DMG-LDMOS(dual-material gate,LDMOS) structure for RF field was proposed accompanied by the concrete realization method in process.The gate of the DMG-LDMOS consists of S-gate(the first gate approaching source with high work-function material p+ poly) and D-gate(the second gate approaching drain with low work-function material n+ poly)using the effective concept "gate engineering".The MEDICI simulations reveal that the DMG-LDMOS can increase the average velocity of electron in the channel,resulting in a higher transconductance.Meanwhile,this structure can increase the breakdown voltage and enhance the maximum cut-off frequency.
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