Abstract:Fabrication of nano-crystalline thin film solar cell by co-sputtering of silicon and aluminum, and metal induced crystallization is reported in this paper. After a brief introduction on magnetron sputtering and aluminum induced crystallization techniques, it discusses the drawbacks of "aluminum induced layer exchange" concept as the common method for fabricating poly-Si thin films; and proposes Si-Al co-sputtering as a simple alternative fabrication method. Then a three-steps process is introduced for the fabrication of "Al electrode/n-Si wafer/p-Si thin film/Al electrode" solar cell. Material and electrical characterizations of the fabricated p-Si thin films are done by Raman spectroscopy, X-ray diffraction, optical microscopy, scanning electron microscopy and Hall Effect measurement to study the crystallization ratio, grain size, morphology, carrier density and mobility of the prepared films, respectively. The best fabricated samples show a crystallization ratio of 88% and the largest grain size of 68 nm. The hole concentration in the films is in the order of 10(18) to 10(19) cm(-1) with a maximum mobility value of 17 cm(2)/V s. Then, photovoltaic properties of the fabricated solar cells are determined by under dark and illumination J-V curves, and external quantum efficiency measurements. Dark J-V curve of the best sample represents an ideality factor of 1.39, rectification ratio of 1993 at 1 V and reverse saturation current density of 62.1 nA/cm(2) which confirms the formation of a good p-n junction. The illuminated J-V curve under AM1.5G conditions exhibits a photovoltaic conversion efficiency of 6.02% for the best sample, with a short circuit current density of 24.9 mA/cm(2) and open circuit voltage of 456 mV. The external quantum efficiency of this sample reaches to more than 59% at the wavelength of 700 nm. Finally, a simple model is proposed to describe the formation of nano-crystalline Si thin film, deposited by Si-Al co-sputtering, during the thermal annealing.

CRYSTALLINE SILICON THIN FILM SOLAR CELLS PREPARED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION ON LOW COST SUBSTRATE

Silicon Rich Carbide As A Conductive Substrate For Si Qd Solar Cells

STUDY ON MICROCRYSTALLINE SILICON THIN FILM SOLAR CELLS ON FLEXIBLE SUBSTRATE

Microcrystalline Silicon‐carbon Alloys As Anti‐reflection Window Layers in High Efficiency Thin Film Silicon Solar Cells

Crystalline Silicon Heterojunction Solar Cell with 81.6% Fill Factor, Deposited by Physical Vapour Deposition Methods Only

Microcrystalline silicon carbide window layers in thin film silicon solar cells

Fabrication of Microcrystalline Silicon Materials and Microcrystalline Silicon Solar Cells and Study on Their Properties

Silicon and Germanium Nanocrystal Inks for Low-Cost Solar Cells

Low-cost Fabrication of Cu 2 ZnSnS 4 Thin Films for Solar Cell Absorber Layers

Monocrystalline Silicon Solar Cells Fabricated by Rapid Thermal Processing

Microcrystalline Silicon Thin Film Solar Cells with Microcrystalline Silicon Carbide Window Layers and Silicon Absorber Layers Both Prepared by Hot‐Wire CVD

Small Pyramidal Textured Ultrathin Crystalline Silicon Solar Cells with Double-Layer Passivation.

Performance Enhancement of Thin-Film Silicon Solar Cells by Development of Core Component Layers

Microcrystalline SiGe Prepared by VHF-PECVD for Thin Film Solar Cells

P-silicon Thin Film Fabricated by Magnetron Sputtering and Aluminium Induced Crystallization for Schottky Silicon Solar Cells

A PRELIMINARY STUDY ON MICROCRYSTALLINE SILICON MATERIALS AND SOLAR CELLS FABRICATED BY VHF-PECVD

Nano-crystalline Thin Films Fabricated by Si-Al Co-Sputtering and Metal Induced Crystallization for Photovoltaic Applications

Rapid Thermal Process to Fabricate Sb 2 Se 3 Thin Film for Solar Cell Application

Investigation of Amorphous Silicon/Microcrystalline Silicon Tandem Solar Cells on Flexible Substrates

High-Performance Ultrathin Organic-Inorganic Hybrid Silicon Solar Cells via Solution-Processed Interface Modification.

Single-chamber Deposition of Intrinsic Microcrystalline Silicon Thin Film and Its Application in Solar Cells