Monocrystalline Silicon Solar Cells Fabricated by Rapid Thermal Processing

HUA Ju-tuan,YANG De-ren,XI Zhen-qiang,NI Li-hong,QUE Duan-lin
DOI: https://doi.org/10.3969/j.issn.1009-6264.2006.06.003
2006-01-01
Abstract:Monocrystalline silicon solar cells were successfully fabricated by rapid thermal processing(RTP) technique,which include rapid thermal phosphorus diffusion,oxidation and metallization.The initial work has resulted in a 62 cm2 cell with conversion efficiency of 11% ,open voltage of 564.6 mV and short current density of 30.7 mA/cm2 on 1 Ω·cm Cz Si using rapid thermal processing technique and screen-printing (SP) technique for the front and back contacts.
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