Abstract:A high efficiency (>18%\documentclass[12pt]{minimal}\usepackage{amsmath}\usepackage{wasysym}\usepackage{amsfonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{mathrsfs}\usepackage{upgreek}\setlength{\oddsidemargin}{-69pt}\begin{document}$$18\%$$\end{document}) industrial large area crystalline silicon wafer solar cell fabrication process generally requires industrial equipment with large footprint, high capital and running costs. Stricter processing window, continuous monitoring and automated functioning are the reasons for it. However, for any conventional laboratory (lab) it is always difficult to manage these requirements with limited available lab space or insufficient fund and other related resources. In this work, we report a novel way to fabricate high efficiency full area aluminium back surface field monocrystalline silicon wafer solar cells in our lab using low-cost processing with small-footprint fabrication tools for 6 inch pseudo-square industrial wafers. The novelty of our work includes optimization of every fabrication process step, e.g., texturization, emitter diffusion, emitter passivation and anti-reflection coating deposition, edge-isolation, screen printing and co-firing individually. These modifications include tuning of processing tools and processes, utility changes and inclusion of additional process steps. Beaker-based chemical processes, manual diffusion furnace, introduction of low temperature oxidation, low temperature silicon nitride deposition processes, plasma-edge isolation tool, single manual screen printer, single oven drying of metal pastes and co-firing using rapid thermal processing tools were used at our lab. For our cells, actual and active area efficiencies of 18.5 and 19% (measured under AM1.5G 1 Sun condition), respectively, were achieved.

High-efficiency Multicrystalline Silicon Solar Cells using Standard High-temperature, Float-zoned Cell Processing

18.2% Efficient Multicrystalline Silicon Cell

RESEARCH ON 400cm2 a-Si/a-Si TANDEM SOLAR CELLS

19.8% Efficient “honeycomb” Textured Multicrystalline and 24.4% Monocrystalline Silicon Solar Cells

Very High Efficiency Silicon Solar Cells-Science and Technology

A 19.8% Efficient Honeycomb Multicrystalline Silicon Solar Cell With Improved Light Trapping

22.7% Efficient Perl Silicon Solar Cell Module With A Textured Front Surface

Improved Efficiency Silicon Solar Cell Module

25-Percent Efficient Low-Resistivity Silicon Concentrator Solar-Cells

Improvement of conversion efficiency of multicrystalline silicon solar cells by incorporating reactive ion etching texturing

Characterization of 23-percent efficient silicon solar cells

Fabrication of High Voltage GaAs Micro-Solar Cell Arrays

Efficient Heterojunction Solar Cells on P-Type Crystal Silicon Wafers

High-efficiency InP-based Multijunction Solar Cells

Conversion Efficiency Enhancement of Multi-Crystalline Si Solar Cells by Using A Micro-Structured Junction

Fully Textured, Production‐line Compatible Monolithic Perovskite/Silicon Tandem Solar Cells Approaching 29% Efficiency

22.7% Efficient Silicon Photovoltaic Modules with Textured Front Surface

23.6% Efficient Low Resistivity Silicon Concentrator Solar Cell

Numerical study of mono-crystalline silicon solar cells with passivated emitter and rear contact configuration for the efficiency beyond 24% based on mass production technology

Active area cell efficiency (19%) monocrystalline silicon solar cell fabrication using low-cost processing with small footprint laboratory tools

Monolithic Perovskite/Silicon Tandems with >28% Efficiency: Role of Silicon‐Surface Texture on Perovskite Properties