Development Of Synchrotron Radiation X-Ray Grazing Incident Diffraction Method

Xiaoming Jiang,Quanjie Jia,Wenli Zheng,Peng Liu,Dingchang Xian,Zuimin Jiang,Xun Wang
DOI: https://doi.org/10.3321/j.issn:0254-3052.2000.12.017
2000-01-01
Abstract:Synchrotron radiation X-ray grazing incident diffraction (GID) method was developed based on the five-circle diffractometer in the Diffuse Scattering Station at Beijing Synchrotron Radiation Facility. The lateral strain induced by the Ge/Si quantum dotswas measured successfully, which showed the capability of the GID method in measuring weak signals from surface structures. The results showed that the formation of Ge/Si quantum dots caused both the lateral expansion-strain and contraction-strain in the surface layer of Si(001) substrate.
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