Abstract:The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-ordered nanostructures. Recently, a novel characterization technique based on X-ray fluorescence measurements in grazing incidence geometry was proposed for such applications. This technique uses the X-ray standing wave field, arising from an interference between incident and the reflected radiation, as a nanoscale sensor for the dimensional and compositional parameters of the nanostructure. The element sensitivity of the X-ray fluorescence technique allows for a reconstruction of the spatial element distribution using a finite element method. Due to a high computational time, intelligent optimization methods employing machine learning algorithms are essential for timely provision of results. Here, a sampling of the probability distributions by Bayesian optimization is not only fast, but it also provides an initial estimate of the parameter uncertainties and sensitivities. The high sensitivity of the method requires a precise knowledge of the material parameters in the modeling of the dimensional shape provided that some physical properties of the material are known or determined beforehand. The unknown optical constants were extracted from an unstructured but otherwise identical layer system by means of soft X-ray reflectometry. The spatial distribution profiles of the different elements contained in the grating structure were compared to scanning electron and atomic force microscopy and the influence of carbon surface contamination on the modeling results were discussed. This novel approach enables the element sensitive and destruction-free characterization of nanostructures made of silicon nitride and silicon oxide with sub-nm resolution.

Grazing-incidence Small Angle X-Ray Scattering Studies of Nanoscale Polymer Gratings

Small Angle X-ray and Neutron Scattering in the Study of Polymers and Supramolecular Systems

In Situ Measurement of Annealing-Induced Line Shape Evolution in Nanoimprinted Polymers Using Scatterometry

GISAXS in the Study of Supramolecular and Hybrid Liquid Crystals

Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings

Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering

An <i>in situ</i> shearing x-ray measurement system for exploring structures and dynamics at the solid-liquid interface

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

Characterization of Dual-Periodic Structures with Optical Scattering

Electric Field Intensity Modulated Scattering as a Thin-Film Depth Probe

Highly Ordered Monolayers of μm-Sized Polystyrene Spheres Studied by Grazing-Incidence Small-Angle X-ray Scattering, Simulations, and Geometrical Calculations

Revealing microscale bulk structure in polymer-carbon nanocomposites using spin-echo SANS

Note: Setup for chemical atmospheric control during in situ grazing incidence X-ray scattering of printed thin films

Scatterometry for in Situ Measurement of Pattern Reflow in Nanoimprinted Polymers

Brillouin Scattering Studies of Polymeric Nanostructures

InN Thin Film Lattice Dynamics by Grazing Incidence Inelastic X-Ray Scattering.

Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning

Understanding Synthesis and Structural Variation of Nanomaterials Through in Situ/Operando XAS and SAXS

X-ray Small-Angle Scattering in the Study of the Structure of Disordered Nanosystems