Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

Philipp Hönicke,Anna Andrle,Yves Kayser,Konstantin V. Nikolaev,Jürgen Probst,Frank Scholze,Victor Soltwisch,Thomas Weimann,Burkhard Beckhoff

DOI: https://doi.org/10.1088/1361-6528/abb557

2020-05-05

Abstract:The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft X-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence X-ray fluorescence technique and thus utilizing the X-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si$_3$N$_4$, where GIXRF data for the O-K$\alpha$ and N-K$\alpha$ fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner.

Applied Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the challenges faced by existing metrology techniques in characterizing surface nanostructures, especially for those ordered nanostructures that require precise control. With the development of nanotechnology, the applications of these nanostructures are becoming more and more widespread, but their manufacturing processes are complex and require precise reconstruction of the size and composition of the nanostructures. Traditional metrology techniques can hardly meet these two requirements simultaneously, especially when dealing with three - dimensional nanostructures. Therefore, this paper proposes a technique based on grazing - incidence X - ray fluorescence (GIXRF), aiming to simultaneously achieve the size and composition characterization of nanostructures, especially detecting the element - sensitive fluorescence radiation in different regions inside the nanostructures with high sensitivity. By changing the incident angle of the excitation radiation, different element - sensitive fluorescence radiations can be emitted, and then the characteristics of the nanostructures can be determined by using an appropriate modeling scheme.

Specifically, the paper demonstrates the application of this technique in two - dimensional and three - dimensional nanostructures, such as silicon nitride gratings and chromium nanocubes. Through GIXRF data, researchers can reconstruct the thin oxide layer on the surface of the silicon nitride grating and conduct a quantitative size and composition parameter analysis of the three - dimensional chromium nanostructure. This method not only provides a non - destructive measurement means but also can provide reliable data within a statistically representative sample area, which is of great significance for current and future nanotechnology metrology.