Investigation on Formation Mechanism of Mod Derived Plt Ferroelectric Thin Films

XQ Wu,W Ren,LY Zhang,X Yao
DOI: https://doi.org/10.1080/00150199908015785
1999-01-01
Ferroelectrics
Abstract:Metallo-organic decomposition method (MOD) derived lead lanthanum titanate(PLT) thin films were fired by rapid thermal annealing (RTA) and conventional furnace annealing (CFA) process, respectively. Morphologies of PLT films with different thickness were observed by a scanning electron microscopy (SEM). SEM results revealed that RTA process is favorable for crystillization and densification of thinner films, but CFA process is suitable for that of films with various thickness. Formation mechanism of MOD derived PLT thin films is similar to that of sputtering PLT thin films, which has a mechanism of nucleation controlled growth.
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