Fabrication of Pb1 − Xlaxtio3 Ferroelectric Ceramic Nanocrystalline Thin Films

ZY PENG,X LI,MY ZHAO,H CAI,BK XU

DOI: https://doi.org/10.1016/0040-6090(95)06602-0

IF: 2.1

1995-01-01

Thin Solid Films

Abstract:Lead lanthanum titanate (PLT) nanocrystalline thin films were fabricated on monocrystalline silicon wafers by a new sol-gel method with microtechnology. IR spectroscopy, thermogravimetric analysis, differential thermal analysis, X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to study the synthesis process and the films obtained. The preparation of a stable precursor solution and the choice of preheating temperature are two cruxes to fabricating nanocrystalline thin films. XRD and SEM showed that the thin films possess a polycrystalline perovskite structure, their surfaces are smooth, and the crystal grains are uniform and spherical or elliptical in form, the average grain sizes are between 20 and 80 nm, the thickness of the films is about 1 μm.