Abstract:Pb(Zr0.4Ti0.6)O-3 thin films with a thickness of 500 nm were spin coated on (110) preferred Pt bottom electrodes using a sol-gel method, in which the (110) preferred Pt bottom electrode was developed by using a (100)-oriented conductive oxide electrode LaNiO3 film as an adhesion layer on a SiO2/Si substrate. X-ray diffraction analysis and field emission scanning electron microscopy show that the as-grown Pb(Zr0.4Ti0.6)O-3 films are highly (110)-oriented with a columnar structure. It indicates that the (110) preferred Pt bottom electrode is effective for growing highly (110)-oriented Pb(Zr0.4Ti0.6)O-3 films. The as-grown Pb(Zr0.4Ti0.6)O-3 films show excellent dielectric and ferroelectric properties with dielectric constant epsilon(T)(33)/epsilon(0)=1620, loss tangent tan delta=2.1%, spontaneous polarization 2P(s)=158 mu C/cm(2), and remnant polarization 2P(r)=92 mu C/cm(2). Excellent pyroelectric properties are also detected in the (110)-oriented films. At room temperature, the pyroelectric coefficient and the figure of merit for detectivity can reach up to 7.8x10(-4) C m(-2) K-1 and 1.79x10(-5) Pa-0.5, respectively. (c) 2007 American Institute of Physics.

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