Investigation of Crystallographic and Pyroelectric Properties of Lead-Based Perovskite-Type Structure Ferroelectric Thin Films
C Shi,MD Liu,CR Li,YK Zeng,J Da Costa
DOI: https://doi.org/10.1016/s0040-6090(00)01250-5
IF: 2.1
2000-01-01
Thin Solid Films
Abstract:Epitaxially grown and polycrystalline PbTiO3 (PT), (Pb, La)TiO3 (PLT) and Pb(Zr, Ti)O3 (PZT) thin films with thicknesses from 1 to 2 μm have been prepared on Pt/Ti/SiO2/Si substrates by means of a sol-gel spin-coating technique. The ferroelectric thin films have good crystallization behavior, excellent dielectric and pyroelectric properties. The pyroelectric coefficients of PT, PLT and PZT thin films are 2.9×10−8 c/cm2·k, (3.37–5.25)×10−8 c/cm2·k and 6.10×10−8 c/cm2·k, respectively. The figures of merit for voltage responsivity of PT, PLT and PZT thin films are 0.60×10−10 C cm/J, (0.59–0.78)×10−10 C cm/J and 0.63×10−10 C cm/J, respectively. The current responsivity of these films are 9.0×10−9 C cm/J, (10.5–16.0)×10−9 C cm/J and 19.1×10−9 C cm/J, and the detectivity are 0.74×10−8 C cm/J, (0.79–1.13)×10−8 C cm/J and 0.83×10−8 C cm/J, respectively.