Preparation and pyroelectric characterization of (Pb, La) TiO3 ferroelectric thin film

Lei Chen,Meidong Liu,Yike Zeng,Yunhua Rao,Churong Li
1999-01-01
Abstract:The preparation of the PLT 15 thin film by Sol-Gel process was discussed. Its structure and electric properties were studied. The results show that the perovskite structure polycrystalline PLT 15 ferroelectric thin film is grown on Si substrate and epitaxial (111) PLT15 thin film is grown on (111) Pt/Ti/SiO2/Si substrate. The PLT thin film has good pyroelectric properties. Its pyroelectric coefficient is 5.25×10-8 C·cm-2K-1, figure of merit for voltage responsivity is 0.78 ×10-10 C·cm/J, for specific detectivity is 1.13 ×10-8 C·cm/J. It is a promising material for pyroelectric detector.
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