Abstract:One of the challenges in fabricating pyroelectric infrared (PIR) detector arrays using microelectromechanical system (MEMS) technique lies in finding an optimal growth method of sensing thin films. In this study, lead zirconate titanate (PbZr0.3Ti0.7O3, PZT) thin films were successfully prepared on Pt/TiO2/Si3N4/SiO2/Si substrates by RF magnetron sputtering. The structure, morphology and electrical properties of the films annealed at different temperatures were investigated. PZT thin films deposited at a working pressure of 3.0 Pa with an Ar/O-2 gas flow ratio of 80/20 and annealed at 700 degrees C exhibited smooth surface and excellent dielectric, ferroelectric and pyroelectric properties. The dielectric constant and the loss tangent of the films are 500 and 0.018 at 1 kHz, respectively. The remnant polarization (Pr) and the coercive field (Er) of the films are 33 mu C cm(-2) and 42 kV cm(-1), respectively. The pyroelectric coefficient of the films is 0.033 pC cm(-2) K-1. The value of the figure of merit of detectivity (FD) of PZT thin films reaches up to 1.29 x 10(-5) Pa-1/2 , which indicates that the films have met the requirements for sensitive layers utilized in pyroelectric infrared detector arrays.

Pulsed laser deposition of pyroelectric PCLT thin films on silicon substrates

Pulsed Laser Deposition of Pyroelectric Pclt Thin Films Using a Ceramic/metal Target

Pulsed Laser Deposition and Characterization of Ferroelectric Pb(Zr,Ti)O-3 Thin Films on Silicon-On-Insulator Substrates

Pulsed Laser Deposition of Highly &gt;001&lt; Oriented (pb,la)tio/sub 3/ Thin Films on [001] LaAlO/sub 3/ Substrates

Preparation and pyroelectric characterization of (Pb, La) TiO3 ferroelectric thin film

(Mn, Sb) Doped Pzt Thin Films with (la, Sr)Coo3 Electrodes for Uncooled Infrared Detectors

Properties Of Pbtio3, La-Modified Pbtio3 And Pb(Zr,Ti)O-3 Thin Films And Their Application To Infrared Detectors

Pulsed Excimer Laser Deposition and Rapid Thermal Annealing of Ferroelectric Pb(Zr0.52Ti0.48)O3 Thin Films on Si-on-Insulator

Enhanced Performance of Pb0.8la0.1ca0.1ti0.975o3/Pb(Nb0.01zr0.2ti0.8)O-3 Multilayer Thin Films for Pyroelectric Applications

Preparation of Pb(Zr<sub>0.52</sub>Ti484848)O<sub>3</sub> thin films on silicon-on-insulator substrates by excimer laser deposition combined with rapid thermal annealing

Study of Nanoscale Banded 90° Domain Patterns and Pyroelectric Properties in (111) Oriented (pb,la)tio3 Thin Films

Preparation of Pb(Zr0.52Ti0.48)O3 thin films on silicon-on-insulator substrates by excimer laser deposition combined with rapid thermal annealing

Pulsed Laser Deposition of Pzt/Baruo3 Bi-Layered Films on Silicon Substrate

Pyroelectric Properties of CaCu 3 Ti 4 O 12 Thin Films Grown by Pulsed Laser Deposition

Preparation of Pb(Zr0.52Ti484848)O3 Thin Films on Silicon-on-insulator Substrates by Excimer Laser Deposition Combined with Rapid Thermal Annealing

INVESTIGATION ON Pb(Zr_(0.3)Ti_(0.7))O_3 PYROELECTRIC THIN FILM MATERIALS

Characterization of Pb(Zr,Ti)O-3 Thin-Films on Soi Prepared by Excimer-Laser Deposition

Preparation and Characterization of Lead Zirconate Titanate Thin Films Grown by RF Magnetron Sputtering for Pyroelectric Infrared Detector Arrays

Preparation of Si-based PZT pyroelectric thick film infrared detector

Pulsed Excimer Laser Deposition of Pb(Zr,Ti)O3thin Films on Simox Substrates

Excimer Laser Deposition of C-Axis Oriented Pb(Zr,Ti)O-3 Thin Films on Silicon Substrates with Direct-Current Glow Discharge