Effect of Bottom Electrodes on Structures and Electric Properties of Plt Ferroelectric Thin Films

ZT Song,W Ren,XQ Wu,LY Zhang,X Yao

DOI: https://doi.org/10.1109/isaf.1996.598205

1996-01-01

Abstract:Lead lanthanum titanate(PLT) thin film with 10 at.% of La and 15 at.% of excess Pb were deposited on Pt/Ti electrodes with different thickness of Ti layer by metallo-organic decomposition(MOD) process. X-ray diffraction (XRD) and scanning electron microscopy (SEM) have been applied to investigate the micro structure and morphology of the PLT thin films. The grain sizes of PLT thin films are between 0.9 similar to 1.5 mu m. The thickness of the Ti layer has a dominant effect oil tile dielectric and ferroelectric properties of the PLT films. Tile dielectric constants of the thin films annealed at 550 degrees C for 1 hr are between 510 similar to 580, the dielectric loss tangent is less than 2%. The remanent polarization is between 6.3 similar to 7.6 mu m/cm(2) and the coercive field is about 68.9 similar to 83.7 kV/cm at 1 kHz.