Sol‐Gel Routes to Nanostructured Patterned Ferroelectric Thin Films with Novel Electronic and Optical Functions

Makoto Kuwabara,Yong Jun WU,Juan Li,T. Koga
DOI: https://doi.org/10.1002/9780470588246.ch30
2009-01-01
Abstract:We have successfully fabricated barium titanate (BaTiO3: BTO) patterned thin films of < 1 μm in thickness on Pt/Ti/Si substrates by combining an electrophoretic deposition (EPD) method using a suspension of BTO nanoparticles and electron beam lithography, which was used to form resist molds on the substrates. A suspension of BTO nanoparticles (size=10-15 nm) for EPD was prepared by dispersing BTO nanocrystals, which were synthesized by a sol-gel process using a high concentration alkoxides solution (1.1 mol/L), in 2-methoxyethanol added with acetylacetone. BTO ceramic thin films obtained by firing the EPD green films at various temperatures between 600° and 800°C consisted of particles with diameters within 30 nm, and had a dielectric constant of about 100 and a dielectric loss < 1% and a very high dielectric strength of more than 500 kV/cm. The obtained nanostructured BTO ceramic thin films and sub-micrometer-sized ceramic pillars exhibited distinct piezoelectric butterfly curves and also clear ferroelectric hysteresis loops: this may prove that even BTO crystals of 30 nm in diameter can exhibit induced ferroelectric characteristics under high electric field.
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