Abstract:We have successfully fabricated barium titanate (BaTiO3: BTO) patterned thin films of < 1 μm in thickness on Pt/Ti/Si substrates by combining an electrophoretic deposition (EPD) method using a suspension of BTO nanoparticles and electron beam lithography, which was used to form resist molds on the substrates. A suspension of BTO nanoparticles (size=10-15 nm) for EPD was prepared by dispersing BTO nanocrystals, which were synthesized by a sol-gel process using a high concentration alkoxides solution (1.1 mol/L), in 2-methoxyethanol added with acetylacetone. BTO ceramic thin films obtained by firing the EPD green films at various temperatures between 600° and 800°C consisted of particles with diameters within 30 nm, and had a dielectric constant of about 100 and a dielectric loss < 1% and a very high dielectric strength of more than 500 kV/cm. The obtained nanostructured BTO ceramic thin films and sub-micrometer-sized ceramic pillars exhibited distinct piezoelectric butterfly curves and also clear ferroelectric hysteresis loops: this may prove that even BTO crystals of 30 nm in diameter can exhibit induced ferroelectric characteristics under high electric field.

Preparation of A Monodispersed Suspension of Barium Titanate Nanoparticles and Electrophoretic Deposition of Thin Films

Preparation of Nano-Structured BaTiO3 Thin Film by Electrophoretic Deposition and Its Characterization

Low-temperature synthesis of barium titanate thin films by nanoparticles electrophoretic deposition

Preparation of Monodisperse Nanocrystalline Barium Titanate

Synthesis of Highly Dispersed Barium Titanate Nanoparticles by a Novel Solvothermal Method

Electrophoretic Deposition and Photoluminescent Properties of Eu-doped BaTiO3thin Film from a Suspension of Monodispersed Nanocrystallites

Barium Titanate Tetragonal Prism Arrays: Preparation and Characterization

Formation of barium strontium titanate thin films via electrophoretic deposition process

Room-Temperature Synthesis of BaTiO<sub>3</sub>Nanoparticles in Large Batches

Barium Titanate Micropatterns Prepared by Electron Beam Lithography and Electrophoretic Deposition

Sol‐Gel Routes to Nanostructured Patterned Ferroelectric Thin Films with Novel Electronic and Optical Functions

Preparation and Characterization of Monodispersed BaTiO3 Nanocrystals Using One-Step Solvothermal Method

Fabrication and Characterization of Micropatterned Barium Titanate Ceramics

Further Study of Preparation of Nanosized BaTiO_3 by Way of Coprecipitation

Synthesis of monodispersed barium titanate nanoparticles with narrow size distribution by a modified alkoxide-hydroxide sol-precipitation method

Electrophoretic deposition of BaTiO3 films from aqueous suspensions

Thin Film Coating with Highly Dispersible Barium Titanate-Polyvinylpyrrolidone Nanoparticles

Experimental and Simulation-Based Understanding of Morphology Controlled Barium Titanate Nanoparticles under Co-Adsorption of Surfactants

Fabrication of Monodispersed 5‐nm BaTiO3 Nanocrystals with Narrow Size Distribution Via One‐Step Solvothermal Route

Size-controlled synthesis of BaTiO3 nanocrystals via a hydrothermal route

Large-scale Synthesis of Nanocrystals of Barium Titanate and Other Titanates Through Solution-Phase Processes