Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

Xiaoqing Wu,Wei Ren,Liangying Zhang,Xi Yao
DOI: https://doi.org/10.1080/00150199708260537
1997-01-01
Ferroelectrics
Abstract:Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 similar to 850 degrees C. The remanent polarization Pr and the coercive field Ec of typical samples are about 5.3 mu C/cm(2) and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.
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