Effect of Rapid Thermal Annealing on the Optical Properties of Nb2O5-Al2O3 Nanolaminate Films

Yue Huang,Yan Xu,Lu, Hong-Liang,Qing-Qing Sun
DOI: https://doi.org/10.1109/icsict.2010.5667480
2010-01-01
Abstract:Nb2O5-Al2O3 nanolaminate films have been grown by atomic layer deposition using (Nb(OC2H5)5)/H2O, and Al(CH3)3/H2O precursors, respectively. Effect of rapid thermal annealing (RTA) on the optical properties of the nanolaminate has been studied using Fourier transform infrared spectroscopy (FTIR), and spectroscopic ellipsometry. From the FTIR result, Al2O3 suppresses the formation of interfacial layer during RTA. The refractive index of the Nb2O5-Al2O3 films is found to increase after the RTA at 500°C, while decrease with the RTA temperature above 500°C. Moreover, the optical band gap of Nb2O5 film deduced from the extinction coefficient shows a gradual increase with increasing annealing temperature, which is related to a decrease in the film disorder.
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