Optical Constants of E-Beam Evaporated and Annealed Nb2O5thin Films with Varying Thickness

Dong-Dong Zhao,Qing-Yuan Cai,Yu-Xiang Zheng,Jin-Bo Zhang,Shang-Dong Yang,Liao Yang,Zhun-Hua Liu,Rong-Jun Zhang,Song-You Wang,Liang-Yao Chen
DOI: https://doi.org/10.1088/0022-3727/49/26/265304
2016-01-01
Abstract:Niobium pentoxide (Nb2O5) films with different thicknesses were prepared using the electron beam evaporation method and then annealed at temperatures from 300 degrees C to 800 degrees C before being characterized by variable-angle spectroscopic ellipsometry, x-ray diffraction, etc. The results showed that the optical constants and microstructures of Nb2O5 films exhibit a strong dependence on the annealing temperature. In the visible light region, the refractive indices show a positive correlation with the annealing temperature from 300 degrees C to 600 degrees C, but a negative correlation from 600 degrees C to 800 degrees C. The amorphous Nb2O5 film converts into TT-Nb2O5 (pseudo-hexagonal) after annealing at 500-600 degrees C, and into T-Nb2O5 (orthorhombic) after annealing at 700-800 degrees C.
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