A Optical And Structural Characteristic On Ingaas/Gaas Strained-Layer Superlattice

Mei Li,Xueqian Li,Xiaowei Song,Zhongjiu Ge,Xingde Zhang
DOI: https://doi.org/10.1117/12.318274
1998-01-01
Abstract:In the present work, the structure characteristic on InGaAs-GaAa/GaAs strained-layer superlattice (SLS) samples have been studied by measuring X-ray double crystal rocking curve in the non-paralle (+. -) setting and photoluminescence (PL), respectively. Using X-ray kinematical theory, we have calculated structure parameters of SLS and discussed the influence of different substrates. Computer simulation of experimental curve have been performed with kinematical diffraction theory. The experimental and simulated awes are basically identical. Reliablity of calculated results using Xray double rocking curve is further confirmed by FL.
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