Annealing-induced Blue Shift in Luminescence Band from Si-implanted SiO2 Layer

AD Lan,BX Liu,XD Bai
DOI: https://doi.org/10.1063/1.366317
IF: 2.877
1997-01-01
Journal of Applied Physics
Abstract:The SiO2 layers thermally grown on Si wafers were implanted by 130 keV Si ions at liquid nitrogen temperature to a dose of 1×1017 ions/cm2. From the as-implanted samples, a visible photoluminescence band centered around 2.0 eV was observed. After postannealing at 1100 °C for 90 min another visible band in the range of 1.7 eV was detected. Interestingly, with increasing thermal annealing time, a blue shift in peak energy and an intensity variation of the 1.7 eV band were observed. A possible interpretation for the observations was discussed in terms of a so-called three-region model.
What problem does this paper attempt to address?