Luminescence band evolution in Si implanted SiO2 layer upon high temperature annealing

B.X. Liu,A.D. Lan,X.D. Bai
DOI: https://doi.org/10.1016/S0254-0584(98)00083-2
IF: 4.778
1998-01-01
Materials Chemistry and Physics
Abstract:The SiO2 layer thermally grown on Si was implanted by 130 and 160 keV Si ions at liquid nitrogen temperature or room temperature to a dose of 1×1017 ions cm−2. From the as-implanted samples, a visible photoluminescence band centered around 2.0 eV was observed. After post annealing at 1100 °C, another visible band in the range of 1.7 eV was detected. Interestingly, with increasing the annealing time, a blue shift of the peak energy and intensity variation of the 1.7 eV band were observed. A possible interpretation for the observations is also discussed.
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