Fabrication of a Symmetric Micro Supercapacitor Based on Tubular Ruthenium Oxide on Silicon 3D Microstructures

Xiaofeng Wang,Yajiang Yin,Xiangyu Li,Zheng You
DOI: https://doi.org/10.1016/j.jpowsour.2013.11.109
IF: 9.2
2014-01-01
Journal of Power Sources
Abstract:A micro-supercapacitor with a three-dimensional configuration has been fabricated using an ICP etching technique. Hydrous ruthenium oxide with a tubular morphology is successfully synthesized using a cathodic deposition technique with a Si micro prominence as a template. The desired tubular RuO2 center dot xH(2)O architecture facilitates electrolyte penetration and proton exchange/diffusion. A single MEMS electrode is studied using cyclic voltammetry, and a specific capacitance of 99.3 mF cm(-2) and 70 F g(-1) is presented at 5 mV s(-1) in neutral Na2SO4 solution. The accelerated cycle life is tested at 80 mV s(-1), and satisfactory cyclability is observed. When placed on a chip. the symmetric cell exhibits good supercapacitor properties, and a specific capacitance as high as 23 mF cm(-2) is achieved at 10 mA cm(-2). Therefore, 3D MEMS microelectrode arrays with electrochemically deposited ruthenium oxide films are promising candidates for on-chip electrochemical micro-capacitor applications. (C) 2013 Elsevier B.V. All rights reserved.
What problem does this paper attempt to address?