A Novel Three-Dimensional Micro Supercapacitor Using Self-Support Nano Composite Materials

C. W. Shen,X. H. Wang,W. F. Zhang,F. Y. Kang,C. Du
DOI: https://doi.org/10.1109/MEMSYS.2011.5734668
2011-01-01
Abstract:This paper reports a novel silicon three-dimensional (3D) micro supercapacitor, featured by a high-aspect-ratio structure and nano porous composite electrode material. Electrochemical characterization results of the prototype with NaNO(3) electrolyte demonstrate that the 3D supercapacitor exhibits both large capacitance (90.7mF/cm(2)) and fast power delivery (51.5mW/cm(2)) per unit area. A very robust stability and high charge/discharge efficiencies (more than 93%) are also observed. As such, it is believed that this work presents a promising approach to achieve micro supercapacitors that are applicable in various energy systems such as micro power suppliers and energy storage devices.
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